Exploration of gate trench module for vertical GaN devices
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DOI: 10.1016/j.microrel.2020.113828
Abstract: Abstract The aim of this work is to present the optimization of the gate trench module for use in vertical GaN devices: we considered the impact of cleaning process of the etched surface of the… read more here.
Keywords: gan devices; gate trench; gate; trench module ... See more keywords