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Published in 2018 at "Nanotechnology"
DOI: 10.1088/1361-6528/aad0b4
Abstract: Plasmon nanoresonators in graphene have many applications in biosensing, photodetectors and modulators. As a result, an efficient and precise patterning technique for graphene is required. Helium ion lithography (HIL) emerges as a promising tool for…
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Keywords:
ion lithography;
lithography;
ion;
triangles patterned ... See more keywords