Experimental study of trimethyl aluminum decomposition
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DOI: 10.1016/j.jcrysgro.2017.05.020
Abstract: Abstract Trimethyl aluminum (TMA) is an important precursor used for metal-organic chemical vapor deposition (MOCVD) of most Al-containing structures, in particular of nitride structures. The reaction mechanism of TMA with ammonia is neither clear nor… read more here.
Keywords: experimental study; pyrolysis; trimethyl aluminum; tma ... See more keywords