Motion-free TSOM using a deformable mirror.
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DOI: 10.1364/oe.394939
Abstract: Through-focus scanning optical microscopy (TSOM) is a model-based optical metrology method that involves the scanning of a target through the focus of an optical microscope. Unlike a conventional optical microscope that directly extracts the diffraction-limited… read more here.
Keywords: focus scanning; tsom; motion free; free tsom ... See more keywords