Research on the DF-TSOM method for detecting subsurface defects of optical components.
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DOI: 10.1364/oe.544413
Abstract: In response to the growing need for detecting subsurface defects at the hundred-nanometer scale, this study introduces what we believe to be a novel dark field through-focus scanning optical microscopy (DF-TSOM) technique. Subsurface defect samples… read more here.
Keywords: research tsom; subsurface; tsom method; detecting subsurface ... See more keywords