Modified Repetitive Control Based Cross-Coupling Compensation Approach for the Piezoelectric Tube Scanner of Atomic Force Microscopes
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DOI: 10.1109/tmech.2019.2893628
Abstract: During the raster scanning of atomic force microscopes (AFMs), the coupling effect from the fast-axis to the slow-axis is extraordinarily pernicious, especially when the scanning rate is set high. Whilst great efforts have been made… read more here.
Keywords: cross coupling; piezoelectric tube; control; coupling effect ... See more keywords