Tunability of p- and n-channel TiOx thin film transistors
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DOI: 10.1038/s41598-018-27598-5
Abstract: To acquire device-quality TiOx films usually needs high-temperature growth or additional post-thermal treatment. However, both processes make it very difficult to form the p-type TiOx even under oxygen-poor growth condition. With the aid of high… read more here.
Keywords: tiox; thin film; tunability channel; type ... See more keywords