Toward a Tunable AlN-Based Piezoelectric MEMS Microphone: Design, Characterization, and Analysis
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DOI: 10.1109/jmems.2025.3558897
Abstract: This work introduces a novel tunable piezoelectric MEMS microphone, featuring a fully clamped membrane and dual-sensing electrodes. The device achieves a baseline sensitivity of -39.31 dB, with tunability enabled by a DC tuning mechanism. The… read more here.
Keywords: aln based; tunable aln; mems microphone; piezoelectric mems ... See more keywords