On-Wafer Series-Through Broadband Measurement of Sub-fF55-nm MOS RF Voltage-Tunable Capacitors
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DOI: 10.1109/lmwc.2018.2851386
Abstract: The objective of this letter oriented toward micro-wave measurement of high-impedance devices using a conventional on-wafer probe station is multiple. First, we provided a quantification of the measurement uncertainty inherent to the setup when measuring… read more here.
Keywords: voltage tunable; mos voltage; series; measurement ... See more keywords