Electrothermally actuated tunable clamped-guided resonant microbeams
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DOI: 10.1016/j.ymssp.2017.05.049
Abstract: Abstract We present simulation and experimental investigation demonstrating active alteration of the resonant and frequency response behavior of resonators by controlling the electrothermal actuation method on their anchors. In-plane clamped-guided arch and straight microbeams resonators… read more here.
Keywords: electrothermally actuated; tunable clamped; resonance frequency; clamped guided ... See more keywords
Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
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DOI: 10.3390/mi8010014
Abstract: We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes… read more here.
Keywords: tunable clamped; arch; clamped guided; arch resonators ... See more keywords