Microstructure evolution and Young's modulus of He-implanted nanocrystalline tungsten film
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Nuclear Materials"
DOI: 10.1016/j.jnucmat.2019.03.009
Abstract: Abstract Nanocrystalline tungsten has been widely investigated due to its excellent irradiation resistance. In this study, the microstructure and related Young's modulus of nanocrystalline tungsten film prepared by dual ion beam sputtering deposition and subsequently… read more here.
Keywords: nanocrystalline tungsten; microstructure evolution; tungsten film; young modulus ... See more keywords
Interface interaction of tungsten film deposited on glassy carbon under vacuum annealing
Sign Up to like & getrecommendations! Published in 2018 at "Vacuum"
DOI: 10.1016/j.vacuum.2017.11.020
Abstract: AJI appreciates the financial support of the National Research Foundation South Africa, through the SA-JINR postgraduate research travel grant (Grant number 110466). read more here.
Keywords: deposited glassy; film deposited; tungsten film; interface interaction ... See more keywords
Highly Selective Polishing Rate Between a Tungsten Film and a Silicon-Dioxide Film by Using a Malic-Acid Selectivity Agent in Tungsten-Film Chemical-Mechanical Planarization
Sign Up to like & getrecommendations! Published in 2020 at "Journal of the Korean Physical Society"
DOI: 10.3938/jkps.76.1127
Abstract: For achieving a highly selective polishing rate between a tungsten (W) film and a silicon-dioxide (SiO 2 ) film in W chemical-mechanical planarization (CMP), we designed W-film CMP slurry by mixing a small-molecule having two… read more here.
Keywords: tungsten film; malic acid; polishing rate; film ... See more keywords