Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Nuclear Materials"
DOI: 10.1016/j.jnucmat.2016.12.009
Abstract: Abstract Tungsten sub-nitride thin films deposited on silicon samples by reactive magnetron sputtering were used as a model system to study the phase stability and microstructural evolution during thermal treatments. XRD, SEM&FIB, XPS, RBS and… read more here.
Keywords: tungsten sub; nitride thin; reactive magnetron; film ... See more keywords