Tuning MEMS cantilever devices using photoresponsive polymers
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DOI: 10.1088/1361-665x/aad013
Abstract: Microelectromechanical systems (MEMS) energy harvesting devices have had limited commercial success partly due to the frequency mismatch between the device and the vibration source. Tuning the cantilever device is one possible solution but developing a… read more here.
Keywords: resonant frequency; tuning mems; frequency; photoresponsive polymers ... See more keywords
Actuation Dependency of Frequency Tuning in MEMS Resonators
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.2975077
Abstract: This letter shows that active tuning of MEMS resonators through temperature is highly dependent on the actuation mechanism used, and demonstrates the adverse effects of using substrate conductive heating characterization results to predict device’s performance… read more here.
Keywords: resonant frequency; frequency shift; tuning mems; frequency ... See more keywords