Geometric Tuning of Stress in Predisplaced Silicon Nitride Resonators.
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DOI: 10.1021/acs.nanolett.2c00613
Abstract: We introduce a novel method to geometrically tune the tension in prestrained resonators by making Si3N4 strings with a designed predisplacement. This enables us, for example, to study their dissipation mechanisms, which are strongly dependent… read more here.
Keywords: tuning stress; stress; silicon nitride; stress predisplaced ... See more keywords