One-Step Dry-Etching Fabrication of Tunable Two-Hierarchical Nanostructures
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DOI: 10.3390/mi15091160
Abstract: Two-hierarchical nanostructures, characterized by two distinct configurations along the height direction, exhibit immense potential for applications in various fields due to their significantly enhanced controllable degree compared to single-order structures. However, due to the limitations… read more here.
Keywords: one step; hierarchical nanostructures; dry etching; two hierarchical ... See more keywords