Investigation of the Electrochemical Stop Etching of Silicon Upon the Fabrication of Cantilevers
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DOI: 10.1134/s1063782620130102
Abstract: Anisotropic etching in potassium hydroxide (KOH) solution with electrochemical stop is commonly used in the formation of thin silicon membranes of sensitive elements in various microelectromechanical devices. However, there are almost no data on investigating… read more here.
Keywords: stop etching; type layer; electrochemical stop; surface ... See more keywords
Improved light extraction efficiency of AlGaN deep-ultraviolet light emitting diodes combining Ag-nanodots/Al reflective electrode with highly transparent p-type layer.
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DOI: 10.1364/oe.416826
Abstract: Enhancement of light extraction efficiency (LEE) of AlGaN-based deep-ultraviolet (DUV) light emitting diodes (LEDs) has been attempted by adopting Ag-nanodots/Al reflective electrodes on a highly transparent complex p-type layer. By thinning the p-GaN to several… read more here.
Keywords: type layer; extraction efficiency; efficiency; light extraction ... See more keywords