Sign Up to like & get
recommendations!
1
Published in 2019 at "Journal of Applied Physics"
DOI: 10.1063/1.5126111
Abstract: Deep level transient spectroscopy was used to investigate point defects introduced by room temperature He-ion irradiation in both fully strained and partially relaxed phosphorous doped n-type Si1 − xGex films epitaxially grown on the Si (001) substrate…
read more here.
Keywords:
si1 xgex;
level;
spectroscopy;
strain ... See more keywords