Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback
Sign Up to like & getrecommendations! Published in 2017 at "Nonlinear Dynamics"
DOI: 10.1007/s11071-017-3653-4
Abstract: Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon which implies the loss of reliability of micro-electromechanical systems. Therefore, it is necessary to understand its mechanism and then reduce the phenomenon. In this… read more here.
Keywords: typical electrostatic; mems resonator; instability typical; electrostatic mems ... See more keywords