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Published in 2019 at "Structural and Multidisciplinary Optimization"
DOI: 10.1007/s00158-018-02191-6
Abstract: In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to…
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Keywords:
ultra precision;
motion;
precision motion;
motion systems ... See more keywords
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Published in 2017 at "Science China Technological Sciences"
DOI: 10.1007/s11431-016-0469-0
Abstract: A potassium dihydrogen phosphate (KDP) optical crystal was machined to an ultra-precision surface with water-in-oil (W/O) micro emulsion polishing fluid. The micro water dissolution principle utilized in the machining process is discussed, its planarization mechanism…
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Keywords:
ultra precision;
water;
surface;
investigation ... See more keywords
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Published in 2018 at "Journal of Mechanical Science and Technology"
DOI: 10.1007/s12206-018-0633-7
Abstract: Ultra-precision polishing is an important processing method for monocrystalline silicon, in order to improve the machining efficiency and obtain good machining quality, it is necessary to investigate the material removal process and process parameters of…
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Keywords:
ultra precision;
monocrystalline silicon;
method;
simulation ... See more keywords
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Published in 2017 at "International Journal of Precision Engineering and Manufacturing"
DOI: 10.1007/s12541-017-0129-x
Abstract: Micro-machining has been widely used for manufacturing of micro molds for flat panel displays. Because the mold has a large area and heavy weight, the workpiece setup system with a high stiffness and ultraprecise positioning…
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Keywords:
ultra precision;
workpiece setup;
micro;
tilting stage ... See more keywords
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Published in 2018 at "Optik"
DOI: 10.1016/j.ijleo.2017.11.055
Abstract: Abstract In the traditional machining method, the surface quality will get worse during the surface figuring process while the surface figure will be destroyed after ultra-smooth polishing process. To obtain an ultra-precision optical surface, these…
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Keywords:
ultra precision;
figure;
surface;
spatial frequency ... See more keywords
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Published in 2020 at "Journal of Cleaner Production"
DOI: 10.1016/j.jclepro.2019.119254
Abstract: Abstract The Ti–6Al–4V alloy is regarded as a typical hard-to-machine material owing to its small thermal conductivity and low deformation coefficient. Large amounts of cutting fluids are required and consumed in the traditional ultra-precision machining…
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Keywords:
ultra precision;
6al alloy;
precision machining;
tool ... See more keywords
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Published in 2019 at "Australian Journal of Mechanical Engineering"
DOI: 10.1080/14484846.2019.1601665
Abstract: ABSTRACT The existing ultra-precision micro-spindles fail to achieve the machining requirement of sub-micron precision because of its large radial error. In this study, the calculation model of radial offset error caused by cutting load is…
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Keywords:
ultra precision;
offset error;
precision micro;
micro ... See more keywords
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Published in 2019 at "Advances in Applied Ceramics"
DOI: 10.1080/17436753.2019.1707414
Abstract: ABSTRACT Silicon carbide (SiC) ceramic has been widely applied to fabricate functional components relying on their excellent physical, chemical and mechanical properties. Meanwhile, it is always highly concerned to seek suitable manufacturing technology and processes…
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Keywords:
ultra precision;
silicon carbide;
carbide;
removal characteristics ... See more keywords
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Published in 2021 at "Physica Scripta"
DOI: 10.1088/1402-4896/ac217e
Abstract: The IV semiconductor materials have a pivotal role in photovoltaic (PV) systems. Research on the optimal grating structure has attracted a lot of interest because of its potential application in light-trapping in thin film PV…
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Keywords:
ultra precision;
solar cell;
trapezoidal grating;
thin film ... See more keywords
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Published in 2022 at "Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science"
DOI: 10.1177/09544062221110393
Abstract: Ultra-precision turning is one of the commonly machining methods to obtain high-quality optical components. Ultra-precision turning machine tools are the industrial equipment that realize ultra-precision turning process. In this paper, a combined design, performance analysis…
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Keywords:
ultra precision;
turning machine;
aerostatic turning;
precision aerostatic ... See more keywords
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Published in 2022 at "Optics express"
DOI: 10.1364/oe.453670
Abstract: Ultra-precision position measurement is increasingly important in advanced manufacturing such as the semiconductor industry and fiber optics or photonics. A vision-based phase estimation method we proposed previously performs position measurement by imaging a 2D periodic…
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Keywords:
ultra precision;
phase;
based phase;
error ... See more keywords