Ultra-Shallow Doping B, Mg, Ni, Cu, Mn, Cr and Fe into SiC with Very High Surface Concentrations Based on Plasma Stimulated Room-Temperature Diffusion
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Materials Engineering and Performance"
DOI: 10.1007/s11665-018-3782-z
Abstract: Very recently, we reported a novel doping method called plasma doping without any external bias (PDWOEB) for the introduction of some impurities into Si and GaN at room temperature (RT). In this work, the RT… read more here.
Keywords: ultra shallow; pdwoeb; surface concentrations; room temperature ... See more keywords
Effect of ultra-shallow metallic gratings on sensitivity enhancement of Goos-Hänchen shift in SPR-based sensors
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DOI: 10.1016/j.ijleo.2020.165690
Abstract: Abstract Metallic gratings have flexible and powerful modulation effects on electromagnetic waves. Reflection and transmission spectra of metallic gratings may become extremely narrow or ultra-wide depending on the grating parameters. In this paper, a surface… read more here.
Keywords: shallow metallic; shift; sensitivity; metallic gratings ... See more keywords
High performance Ge ultra-shallow junctions fabricated by a novel formation technique featuring spin-on dopant and laser annealing for sub-10 nm technology applications
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2016.10.002
Abstract: Abstract In this work, we explored a novel technique for the formation of ultra-shallow p+/n and n+/p junctions on Ge substrate using the spin-on dopant (SOD) followed by laser annealing (LA). The junction depth and… read more here.
Keywords: technique; ultra shallow; formation; shallow junctions ... See more keywords