Ultrahigh-Q photonic crystal cavities in silicon rich nitride.
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DOI: 10.1364/oe.25.027334
Abstract: Ultrahigh-Q Photonic Crystal cavities were realized in a suspended Silicon Rich Nitride (SiNx) platform for applications at telecom wavelengths. Using a line width modulated cavity design we achieved a simulated Q of 520,000 with a… read more here.
Keywords: silicon rich; crystal cavities; photonic crystal; ultrahigh photonic ... See more keywords