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Published in 2021 at "Nature Communications"
DOI: 10.1038/s41467-021-23427-y
Abstract: Despite its advantages of scalable process and cost-effectiveness, nanoimprinting faces challenges with imprinting hard materials (e.g., crystalline metals) at low/room temperatures, and with fabricating complex nanostructures rapidly (e.g., heterojunctions of metal and oxide). Herein, we…
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Keywords:
complex nanostructures;
temperature ultrasonic;
ultrasonic nanoimprinting;
room temperature ... See more keywords