Extreme ultraviolet metalens by vacuum guiding
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DOI: 10.1126/science.adg6881
Abstract: Extreme ultraviolet (EUV) radiation is a key technology for material science, attosecond metrology, and lithography. Here, we experimentally demonstrate metasurfaces as a superior way to focus EUV light. These devices exploit the fact that holes… read more here.
Keywords: extreme ultraviolet; vacuum guiding; euv; ultraviolet metalens ... See more keywords