Uncovering the Mechanism for Electron-beam Manipulation of Dopants in Silicon
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DOI: 10.1017/s1431927620022035
Abstract: Covalently bound impurity atoms in crystal lattices can be manipulated via the elastic backscattering of probe electrons from nuclei using the atomically focused electron irradiation of a scanning transmission electron microscope [1]. Early work discovered… read more here.
Keywords: manipulation; mechanism electron; uncovering mechanism; electron ... See more keywords