LAUSR

Understanding Kinetics of Defect Annihilation in Chemoepitaxy-Directed Self-Assembly.

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0 Published in 2021 at "ACS applied materials & interfaces"

DOI: 10.1021/acsami.1c03830

Abstract: Directed self-assembly (DSA) of block copolymers (BCP) has attracted considerable interest from the semiconductor industry because it can achieve semiconductor-relevant structures with a relatively simple process and low cost. However, the self-assembling structures can become… read more here.

Keywords: annihilation; understanding kinetics; self assembly; defect annihilation ... See more keywords