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Published in 2018 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2018.04.007
Abstract: Abstract Because of the low thermal conductivity of the SiO2 (oxide), the Buried Oxide (BOX) layer in a Silicon-On-Insulator Metal-Oxide Semiconductor Field-Effect Transistor (SOI MOSFET) prevents heat dissipation in the silicon layer and causes increase…
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Keywords:
soi mosfet;
region;
soi;
device ... See more keywords