Electron beam lithography inscribed varied-line-spacing and uniform integrated reflective plane grating fabricated through line-by-line method
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DOI: 10.1016/j.optlaseng.2020.106456
Abstract: Abstract A varied-line-spacing (VLS) and uniform integrated reflective plane grating was inscribed by electron beam lithography (EBL) and reactive ion etching method, and its displacement sensing characteristics was tested. For the VLS grating, the groove… read more here.
Keywords: integrated reflective; reflective plane; uniform integrated; varied line ... See more keywords