Articles with "uniformity yield" as a keyword



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Fabrication of Planar-Integrated SIS Mixer Circuits with Improved Uniformity and Yield

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Published in 2020 at "Journal of Low Temperature Physics"

DOI: 10.1007/s10909-020-02433-2

Abstract: Single-pixel prototype superconductor–insulator–superconductor (SIS) mixer integrated circuits (ICs) for multi-beam heterodyne receivers were fabricated. We introduced plasma-enhanced chemical vapor deposition (PE-CVD) for insulator layer deposition and machine-aligned via-hole etching for contact-hole definition on SIS junctions… read more here.

Keywords: sis; sis mixer; uniformity yield; fabrication planar ... See more keywords