Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients
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DOI: 10.1063/5.0056802
Abstract: In this study, we propose a new piezoelectric measurement method using unimorph microcantilevers to evaluate precise values of direct and converse piezoelectric coefficients for piezoelectric microelectromechanical system applications. We fabricated unimorph microcantilevers comprising 3-μm-thick polycrystalline… read more here.
Keywords: direct converse; piezoelectric coefficients; converse piezoelectric; unimorph microcantilevers ... See more keywords