The effect of unintentional carbon incorporation on the electrical properties of AlGaAs grown by MOCVD
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DOI: 10.1016/j.optmat.2020.110227
Abstract: Abstract The materials of AlxGa1-xAs, as a wide application semiconductor material, have attracted a lot of attention. However, the unintentional doping is as an unsolved problem of the influence of materials properties, and has always… read more here.
Keywords: carbon; unintentional carbon; carbon incorporation; alxga1 xas ... See more keywords