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Published in 2017 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2016.11.026
Abstract: Abstract Unintentional gallium incorporation was observed and investigated in the epitaxial growth of InGaN by metalorganic vapor phase epitaxy. InGaN was grown without intentional gallium precursor and the gallium incorporation rate was found not dependent…
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Keywords:
source;
gallium incorporation;
gallium;
incorporation ... See more keywords