Prediction of OES intensity ratios based on coating unit data in HPPMS processes by ANN
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DOI: 10.1088/1361-6463/acd793
Abstract: High Power Pulse Magnetron Sputtering (HPPMS) processes are characterized by high peak powers and peak voltages. This results in a high fraction of ionized metal ions within the coating plasma. In order to analyze the… read more here.
Keywords: intensity ratios; unit data; unit; prediction ... See more keywords