Pile-Ups Formation in AFM-Based Nanolithography: Morpho-Mechanical Characterization and Removal Strategies
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DOI: 10.3390/mi13111982
Abstract: In recent decades, great efforts have been made to develop innovative, effective, and accurate nanofabrication techniques stimulated by the growing demand for nanostructures. Nowadays, mechanical tip-based emerged as the most promising nanolithography technique, allowing the… read more here.
Keywords: formation afm; ups formation; afm based; pile ups ... See more keywords