Effects of gamma radiation on suspended silicon nanogauges bridge used for MEMS transduction
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DOI: 10.1016/j.microrel.2020.113736
Abstract: Abstract This paper proposes a study on the resilience to radiation of MEMS sensors based on piezoresistive transduction by means of suspended silicon nanogauges. It is particularly interesting for applications in severe environment like in… read more here.
Keywords: bridge used; nanogauges bridge; used mems; silicon nanogauges ... See more keywords