Multifractal analysis of sputtered indium tin oxide thin film surfaces
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.04.170
Abstract: Abstract The aim of this study was to provide important insights into the micromorphology of sputtered indium tin oxide (ITO) prepared on glass substrates by direct current (DC) magnetron sputtering at room temperature using atomic… read more here.
Keywords: sputtered indium; tin oxide; indium tin; group using ... See more keywords
Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
Sign Up to like & getrecommendations! Published in 2021 at "Nanoscale Research Letters"
DOI: 10.1186/s11671-021-03494-2
Abstract: We analyzed the dry etching of perovskite oxides using argon-based inductively coupled plasmas (ICP) for photonics applications. Various chamber conditions and their effects on etching rates have been demonstrated based on Z-cut lithium niobate (LN).… read more here.
Keywords: using argon; coupled plasmas; spectroscopy; photonics applications ... See more keywords
Characteristics of Radio Frequency Dielectric Barrier Discharge Using Argon Doped with Nitrogen at Atmospheric Pressure
Sign Up to like & getrecommendations! Published in 2022 at "Materials"
DOI: 10.3390/ma15217647
Abstract: In order to study the characteristics of radio frequency dielectric barrier discharge (RF-DBD) using argon doped with nitrogen at atmospheric pressure, electrical and optical diagnoses of the discharge with different nitrogen ratios from 1% to… read more here.
Keywords: characteristics radio; argon; argon doped; using argon ... See more keywords