Nanoscale compositional analysis of wurtzite BAlN thin film using atom probe tomography
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DOI: 10.1063/5.0027861
Abstract: In this work, the local atomic level composition of BAlN films with ∼20% B was investigated using atom probe tomography. Dislocations and elemental clustering were confirmed along which Al atoms tend to segregate. The presence… read more here.
Keywords: atom probe; using atom; compositional analysis; probe tomography ... See more keywords