Ohmic contacts to n-type 3C-SiC using Cr/Ni/Au and Ni/Cr/Au metallizations
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DOI: 10.1016/j.mee.2019.111016
Abstract: Abstract The electrical characteristics of Cr/Ni/Au and Ni/Cr/Au contacts to n-type 3C-SiC have been examined using a two-contact circular test structure. In Ni/Cr/Au contacts with Ni as contact layer and Cr as intermediate layer, both… read more here.
Keywords: using metallizations; contacts type; layer; ohmic contacts ... See more keywords