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Published in 2019 at "Optics express"
DOI: 10.1364/oe.27.005755
Abstract: We demonstrate the enhancement of femtosecond (fs) laser-induced filaments in air and nitrogen flow fields using a nanosecond (ns) laser. With the ns laser being imposed on the filaments, the length and the emission intensity…
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Keywords:
femtosecond laser;
using nanosecond;
nanosecond laser;
laser ... See more keywords
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Published in 2021 at "Applied Physics Express"
DOI: 10.35848/1882-0786/abd718
Abstract: In situ phosphorus-doped silicon (ISPD) has been actively investigated as a source/drain material. However, defect formation during the epitaxial growth of ISPD layers in 3D structures deteriorate the device performance. In this study, we investigate…
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Keywords:
phosphorus doped;
doped silicon;
laser annealing;
situ phosphorus ... See more keywords