MEMS Flow Sensor Using Suspended Graphene Diaphragm With Microhole Arrays
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DOI: 10.1109/jmems.2018.2874231
Abstract: This letter reports a miniature flow sensor using a suspended composite membrane of graphene and silicon nitride containing an array of microscale through-holes. As a fluid flow passes through these microholes, the graphene layer of… read more here.
Keywords: using suspended; sensor using; mems flow; graphene ... See more keywords