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Published in 2017 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2017.02.072
Abstract: Abstract Epitaxial MoNx layers deposited on MgO(001) by reactive magnetron sputtering in 20 mTorr N2 at Ts = 600–1000 °C exhibit a cubic rock-salt type structure, a N-to-Mo ratio that decreases from x = 1.25–0.69 with increasing Ts, and a…
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Keywords:
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