A Novel Approach for Large-Scale Fabrication of Nanoscale Vacuum Electronic Devices With High Compatibility and Controllability
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2025.3580064
Abstract: A novel approach is proposed for the fabrication of planar nanoscale vacuum electronic devices (NVEDs), combining chemical mechanical polishing (CMP) and selective etching techniques. Utilizing this method, we successfully fabricated planar NVEDs featuring uniform vacuum… read more here.
Keywords: novel approach; vacuum electronic; nanoscale vacuum; vacuum ... See more keywords
Efficient Calculation of Impedance Matrices for Vacuum Electronic Device Circuit Structures
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2018.2809638
Abstract: We present a computationally efficient method for the calculation of impedance matrices of a large class of standing- and traveling-wave structures used in klystrons, traveling-wave tubes, and other vacuum electronic (VE) devices. By treating the… read more here.
Keywords: calculation impedance; xref; vacuum electronic; impedance matrices ... See more keywords
Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices
Sign Up to like & getrecommendations! Published in 2024 at "Micromachines"
DOI: 10.3390/mi15111357
Abstract: Advances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz) frequency radiation, which… read more here.
Keywords: vacuum electronic; thz vacuum; electronic devices; microfabrication technologies ... See more keywords