Emerging laser-assisted vacuum processes for ultra-precision, high-yield manufacturing.
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DOI: 10.1039/d2nr03649e
Abstract: Laser technology is a cutting-edge process with a unique photothermal response, precise site selectivity, and remote controllability. Laser technology has recently emerged as a novel tool in the semiconductor, display, and thin film industries by… read more here.
Keywords: vacuum; laser; vacuum processes; assisted vacuum ... See more keywords