Erratum to: Enhancement of silicon nanowire opto-electric properties by combining acid vapor etching and lithium pore-filling
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Materials Science: Materials in Electronics"
DOI: 10.1007/s10854-017-7462-9
Abstract: In this paper, we report a novel method combining acid vapor etching (AVE) and Lithium (Li) pore-filling aiming to enhance the opto-electrical properties of silicon nanowires (SiNWs). Images provided by both scanning and transmission electron… read more here.
Keywords: pore filling; lithium pore; acid vapor; combining acid ... See more keywords
Effect of Silver-Assisted Chemical Vapor Etching on morphological properties and silicon solar cell performance
Sign Up to like & getrecommendations! Published in 2017 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2017.02.019
Abstract: Abstract In this work, we report a novel, simple and reproducible etching technique named Silver-Assisted Chemical Vapor Etching method (Ag-ACVE). It consists to expose Ag-loaded silicon substrates to vapors emanating from HF/H2O2 hot solution. The… read more here.
Keywords: chemical vapor; solar cell; vapor etching; silicon solar ... See more keywords
Vapor etching to avoid micro-masking by gas-bubbles in wet release of MEMS
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/acd25d
Abstract: We report on the formation of gas bubbles during the release of MEMS devices using buffered oxide etch. Several approaches to mitigate the problem are proposed and tested together with a qualitative study of the… read more here.
Keywords: release mems; etching avoid; vapor etching; gas bubbles ... See more keywords