Impact of Mole Fractions due to Work Function Variability (WFV) of Metal Gate on Electrical Parameters in Strained SOI-FinFET
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DOI: 10.1007/s12633-019-00163-z
Abstract: In the recent sub-20 nm technology node, the process variability issues have become a major problem for scaling of MOS devices. We present a design for a strained Si/SiGe FinFET on an insulator using a 3D… read more here.
Keywords: variability wfv; variability; work function; electrical parameters ... See more keywords