Deposited poly-Si as on-demand linewidth compensator for on-chip Fabry–Perot interferometer and vertical linear variable optical filter bandpass and passband manipulation
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ab035c
Abstract: Deep reactive ion etching (DRIE) is an important process for etching vertical structures for microelectromechanical systems. Due to the sidewall profile of some photoresists as well as effects from upstream processes, bulk micromachined structures, to… read more here.
Keywords: variable optical; optical filter; perot interferometer; fabry perot ... See more keywords
Photonics-Based Millimeter-Wave Band Remote Beamforming of Array-Antenna Integrated With Photodiode Using Variable Optical Delay Line and Attenuator
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Lightwave Technology"
DOI: 10.1109/jlt.2018.2821185
Abstract: For simplification of mobile base station architecture, we present remote beamforming of an array antenna integrated with photodiode based on photonics. Variable optical delay lines (VDLs) and variable optical attenuators (VOAs) are utilized for tailoring… read more here.
Keywords: remote beamforming; array antenna; variable optical; beamforming array ... See more keywords
Linear variable optical attenuators with shaped-finger comb-drive actuators.
Sign Up to like & getrecommendations! Published in 2020 at "Applied optics"
DOI: 10.1364/ao.59.000277
Abstract: A design method is proposed for variable optical attenuators (VOAs), aiming at linear attenuation-voltage characteristics, and verified by finite element analysis. Devices of interest are planar VOAs based on microelectromechanical systems technology, with either a… read more here.
Keywords: drive actuators; variable optical; linear variable; comb drive ... See more keywords