Quantitative measurements of various gases in high and ultrahigh vacuum
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DOI: 10.1116/1.5018210
Abstract: Two calibration methods for ionization gauges, a measurement method for the effective pumping speed of turbomolecular pumps, and a method for introducing low gas flow rates into vacuum chambers were examined. Twenty-four gases were used,… read more here.
Keywords: measurements various; various gases; conductance; vacuum ... See more keywords