Effect of vertical deposition angle on structural and optical properties of tantalum oxide nano layers deposited by electron gun evaporation
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DOI: 10.1016/j.cjph.2021.09.008
Abstract: Abstract Tantalum oxide nano layers were deposition on glass substrate with different thicknesses (30, 60, 90 and 120 nm) in vertical deposition angle and high vacuum condition at room temperature by using electron gun evaporation… read more here.
Keywords: nano layers; vertical deposition; deposition angle; tantalum oxide ... See more keywords