LAUSR

Vertical SiC taper with a small angle fabricated by slope transfer method

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1 Published in 2019 at "Electronics Letters"

DOI: 10.1049/el.2019.0232

Abstract: In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to… read more here.

Keywords: slope transfer; slope; method; vertical sic ... See more keywords