Enhanced Vertical Sidewall Quality for Functional AlN Films in 3D Piezo MEMS Applications
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DOI: 10.1002/aelm.202500066
Abstract: Integrating piezoelectric materials onto the vertical surfaces of microelectromechanical systems (MEMS) microstructures enables three‐dimensional piezoelectric (3D piezoMEMS) devices, providing multi‐axis sensing and actuation capabilities with a reduced device footprint. Metal–organic chemical vapor deposition (MOCVD) is… read more here.
Keywords: quality; quality functional; vertical sidewall; enhanced vertical ... See more keywords