Articles with "vertical smooth" as a keyword



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Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes

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Published in 2023 at "Micromachines"

DOI: 10.3390/mi14040846

Abstract: Micro-optical gyroscopes (MOGs) place a range of components of the fiber-optic gyroscope (FOG) onto a silicon substrate, enabling miniaturization, low cost, and batch processing. MOGs require high-precision waveguide trenches fabricated on silicon instead of the… read more here.

Keywords: vertical smooth; deep trenches; silicon deep; process ... See more keywords